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Multi-target megnetron sputtering system (roll to roll evaporation system, etching system, ALD, PECVD, targets & spare parts)
FLOWLINK Valve (dedicated for vacuum, special gas and Aixtron System)
ANNEALSYS RTP system (rapid thermal processing system for lab and pilot-line)
Ultratech Inc. (ALD systems etc.)
centrotherm clean solutions & Co. KG gas treatment system (treatment devices for poisonous and special gases)
centrotherm thermal solutions & Co. KG CVD/vacuum welding system (centrotherm cvd system and vacuum welding system)
TYSTAR CORPORATION (diffusion furnaces, oxidation furnace, annealing furnaces, CVD systems etc.)
MPA Industrie CVD system (for infared window material, pyrolytic carbon, space mirror, compond material, atomic energy, etc)
 
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